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產品型號：Two Zones CSS Furnace for Rapid Thermal Processing upto 5＂ Dia Wafer at Max.800℃-OTF-1200X-RTP-II-5
電爐類型：高溫電爐系列
電爐規格：
加熱溫度：
電爐系列：高溫馬弗爐
應用范圍：。
| Furnace structure amp; Vacuum Chamber | 、Two temperature controllers. 、The chamber is made of high purity fused quartz tube. 、Quartz tube size: 11" OD/10.8" IDx9" H 、The vacuum flanges are made of Stainless Steel 316. |
| Vacuum Flanges | 、Top Flangewithone KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily. 、Bottom flangehasone KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves. 、The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a qualitymechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately). 、One digital vacuum gauge is installed on the top flange. 、Precision anti-corrosion digital vacuum gauge is in standard package(Since 2016.03.24). |
| Gas Flow Control | Gas mixer integrated with two float-meters with adjustable measurement ranges of16 -160 mL/m |
| Heater and Sample Holder | 、Two independently controlled heaters with amanuallyadjustable gap from 2 - 30 mm. 、20 pcs Halogen lamps are used as the heating element for rapid thermal processing. 、Heaters are is made of stainless steel with water cold jacketto reduce heat radiation and allow for fast cooling. 、5" Dia. the circular wafer holder is built into the top heater for holding the substrate. 、One set of high thermal-conductive AlN plates or graphite plate (5" Dia.x0.5mm Thick) is included (place on the bottom for evaporating material ) 、A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs). |
| Temperature Controller | 、Two precision digital temperature controllers with 30 segments programmable offer independent control of the top and bottom heaters. 、Each controller has PID autotune function to protect heaters from overshooting and an alarm function to avoid overheating and a thermal couple are broken. 、PC communication interface amp; software is installed for (click thepicture below for details) recording temperature profile shown as below. |
| Working Temperature | 、Maximum temperature for each heater: ＜= 800oC. 、Maximum temperature difference between two heaters: ＜= 300oC depends on thespacing between two heaters: o Spacing 30mm Max. temp difference: 315oC heating bottom only |
| Heating amp; Cooling Rate | 、Heating: ＜ 8oC/s ( heating single heater only ) 、Cooling: ＜ 10oC/s (600 - 100oC) Max. |
| Thermal Couple | Two K-type thermal couples are installed on top and bottom heaters separately. |
| Working Voltage | 220VAC, Single Phase, 60A Air Breaker required |
| Power Requirement | 9.5KW total |
| Dimensions | 1085mm Lx680mm Wx1710mm H |
| Shipping Weight amp; Dimension | 、Two pallets: 525 lbs and48"x40"x87" and 165 lbs with 39x31x29" dimension |
| Optional | 、One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach ＜ = 10E-2 torr by mechanical pump. 、If you run corrosive gas, please consider to use the anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost. 、You may choose digital MFC gas delivery system by clicking the first picture from the right below. |
| Warranty | One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty). |
| Laptop, software amp; WiFi Control (Optional) | 、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. 、 Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. 、Note:The software is only compatible with Yudian Temperature Controller |
| Compliance | 、CE Certified 、NRTI or CSA Certification is available upon request,additional charges will apply. |
| Operation Instructions | |
| Application Notes amp; Warnings | 、The tube furnaces with quartz tube are designed for use under vacuum and low pressure ＜0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to ＜ 200 SCCM (or 200 ml/min)for reducing thermal shocks to the tube. 、Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、The foot-stand of this furnace is designed for short distance hauling on the even surface |
| References(please click right to see related articles) | ?Please read the article:High-efficiency CSS CdTe Solar Cell ?UCLA researchers improve the process for manufacturing highly efficient solar cells ?Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process ?Sub 150 ℃Processed Meso-superstructure Perovskite Solar Cells with Enhanced Efficiency ?Best_Research-Cell_Efficiencies ?Thin-film Sb2Se3 Photovoltaics with oriented one-dimensional ribbons and benigngrain boundaries. |
高溫馬弗爐 致密耐火澆注料抗爆裂試驗爐 高溫抗拉強度試驗機 箱式氣氛電爐
滑軌爐 1200℃大口徑滑軌爐 管式快速退火爐 滲碳爐爐蓋總成
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