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  • Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station _Complete Acessories(up to 1E-4torr _1100℃)OTF-1200X-RTP-HV-LD

Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station _Complete Acessories(up to 1E-4torr _1100℃)OTF-1200X-RTP-HV-LD

產品型號:Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station _Complete Acessories(up to 1E-4torr _1100℃)OTF-1200X-RTP-HV-LD

電爐類型:高溫電爐系列

電爐規格:

加熱溫度:

電爐系列:高溫馬弗爐

應用范圍:。


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產品簡介 / Introduction

Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100℃ ) - OTF-1200X-RTP-HV-LD

Product Description

Compact 4“ RTP Tube Furnace with High Vacuum Station amp; Complete Accessories (up to 10^-5 torr amp; 1100℃) - EQ-OTF-1200X-4-RTP-HV

OTF-1200X-RTP-4-HV is aUL certifiablecompact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. Thefurnaceis heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 30 segments precision temperature controller is built in with accuracy +/-1°C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
FurnacestructureCompact 4“ RTP Tube Furnace(Double layer steel case mullite liner)
Heating element8 pcs Halogen light tube (D=10 L=300 T =200, mm)
Working Temp.1100℃max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting)
Max heating rate50°C/sec
Max cooling rate64°C/min (Under vacuum: 200 mtorr), 117°C/min (Under atmosphere pressure)
Heating zone12" length with 4" constant temperature zone within +/-1℃uniformity
Program Temp. Controller 、PID automatic control via SCR (Silicon Controlled Rectifier)power control with phase angle fired, current limiting resistor. 、30 programmable segments for precise control of heating rate, cooling rate anddwell time. 、Please click here to learn why SCR is more accurate than SSC (Solid state relay). 、Built in PID Auto-Tune function with overheating amp; broken thermocouple brokenprotection. 、Over temperature protection and alarm allows for operation without attendant(s). 、+/- 1 oC temperature accuracy. 、RS485 Communications Port. 、PC Control: o A MTS-02control moduleis included for PC control on this furnace. o The new version of PC module is now compatible with Lab View 05/08/2014 o A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
Quartz Tube amp; Sample Holder 、Quartz Tube Size: 4.33" O.Dx4.05" I.D x16.2" Length 、3" diameter Sample holder is inserted to sliding flange, which is made of quartz 、One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia. 、AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area 、The sample holder is removable from flange
Vacuum flangeKF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
Water Cooling Jacket 、Cooling water is required. 、Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25oC; pressure gt; 25 PSI. 、We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000oC ~ 1100oC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meterOne flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
Power input208-240 AC, 50/60 Hz single phase, 9 KW Max. (gt; 60A breaker required)
HV StationHigh Vacuum StationStructure 、Mobile cart size: 600 (L)x600 (W)x700(W), mm 、Max. Loading: 600 Lbs on top 、Molecular pump control Panel : LCD digital 、Diaphragm Pumpand Turbo Molecular Pumpare installed inside the steel case.
Vacuum Degree6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
Control panel 、One button operation- the diaphram pump and the turbo molecular pump will start after pressing "start" button. 、System controlled spining speed- the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber. 、Self protection- the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 、LCD screen- double lines parameters checking interfacemake the working easier to be handled.
Self testingSpinning up
Start-up time2 minutes
Backing Pump Volume Flow Rate at 10 mbar3.8 L/min for 50Hz and 4.4 L/min for 60Hz
Power input110V AC or 220V AC switchable, 50/60Hz
Power consumptionDuration/Max power: 100/110Watt
Shipping InfoWeight and DimensionRTP furnace: 110 lbs, 760x330x530mm (30"x13"x21" inch) LxWxHHV station: 40 lbs, 600x600x700mm (24"x24"x28") LxWxH
WarrantyOne year limited warranty with lifetime support(Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Laptop, software amp; WiFi Control (Optional) 、Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Temperature Control System (EQ-MTS01)enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for STR-furnaces. 、A wireless remote control provides up to 300 meters operating range. 、Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

?Note: The software is only compatible with Yudian Temperature Controller

ComplianceCE Certified 、The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 、Temperature controller is MET and CE Certified 、High Vacuum Station is TUV Certified
Application NotesClick here to learnthe installation of a gas regulator 、Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa 、Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000℃Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.Click here to learnthe installation of a gas regulator. 、The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions
Standard package
Item No.NameQtyLink
EQ-PV-HVSCompact Turbo molecular Vacuum Pump Station1
EQ-MTS02Temperature PC control system (cable and software)1
RTP-ACC-01Sample Holder for RTP Furnace1
AIN-HolderAluminum Nitride Substrate for PTP Furnace1 pc
EQ-QZTube-RTPQuartz Tube: 4.33" O.Dx4.05" I.D x16.2" Length for RTP Tube Furnace (installed)1 pc
RTP-ACC-02Quartz heat shield disk4 pc
EQ-RTP-Halogen-lightHalogen light (heating elements)8 pc
High Temperature Silicone O-ring (?108)6 pc
High Temperature Silicone O-ring (?118)3 pc
20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI1 pc
KF-Valve-D25KF-25 Vacuum right angle valve1 pc
EQ-KF-Clamp-D25Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter4 pc
EQ-KF-Clamp-D40Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter3 pc
RU-KF40-25KF40 to KF25 Reducer Union RU-KF40-251 pc
EQ-KF-Pipe-D25KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)2 pc
EQ-CVM-211Compact Digital Vacuum Gauge1 pc
RT36-0063 A Fuse2 pc
RT14-204 A fuse2
Optional
You must implement cooling water during operation.Please make sure the flow rate of cooling watergt;= 3L/min, water temp. < 20oC pressure gt; 25 PSIWe suggest you use recirculating water chiller as cooling system (please order separately at the related product below) to save water.You can use flowing tap water as cooling source at flowing rate gt; 8 Liter/minute.Warning 1:With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.Warning 2:With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.Optional for upgrade: You may choose our gas mixer to replace mobile cart for better gas control- ( please order at the the related product below) Water cooling chiller Gas mix station
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