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1200℃ PECVD Tube Furnace:STR-PECVD60-12

產(chǎn)品型號：1200℃ PECVD Tube Furnace:STR-PECVD60-12

電爐類型：Tube Furnace

電爐規(guī)格：STR-PECVD60-12

加熱溫度：1200℃

電爐系列：高溫馬弗爐

應(yīng)用范圍：1200℃ PECVD Tube Furnace。

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產(chǎn)品簡介 / Introduction

Furnace Name:1200℃ PECVD Tube Furnace

Model No. :STR-PECVD60-12

Quartz Tube（OD):Φ60 x 1200mm

Heating Zone Length : 440MM

Continuous Temp. :1200℃

Max Temp.:1100℃

Heating Element:High Quality Alloy Resistance Wire（HRE）

Power Supply:220V/2.6kw

Temperature Precision: ±1℃

Thermocouple: K type

Description

PECVD system (Plasma Enhanced Chemical Vapor Deposition System) is composed of four modules: tube furnace, vacuum acquisition, flow contrp and radio frequency power supply. This equipment uses 13.56Mhz radio frequency output to ionize the gas containing the constituent atoms of the film and form a Plasma, using the strong chemical activity of plasma, improves the reaction conditions, and makes the gaseous substances containing thin films react chemically, so as to realize a new preparation technpogy for the growth of thin film materials, and finally obtain the desired thin film deposited on the substrate, which is suitable for SiO2 and SiNx films were deposited at 1200℃.

Design Features

1. The CVD tube furnace system consists of tube furnace, vacuum acquisition, flow contrp and RF power supply

2. The tube furnace can choose different tube diameters and the length of the constant temperature zone, and the two ends of the tube are equipped with high-vacuum stainless steel sealing flanges;

3. The vacuum acquisition system can choose different vacuum pumps according to the test requirements. The vacuum degree of the rotary vane mechanical vacuum pump is ≤50pa, and the vacuum degree of the mpecular pump vacuum unit is 1×10-4pa;

4. The air supply system can choose 3-way float manual and 3-way automatic mass flow system

5. Vacuum measurement is digital composite vacuum machine or Pirani vacuum gauge

6. Choose 13.56Mhz equipment power supply for plasma discharge, and power output can choose 200W, 300W and 500W

7. The tube furnace can choose single temperature zone 440mm, or choose three temperature zones or multiple temperature zones for temperature gradient test

8. The built-in RS485 digital communication port and USB adapter of the thermostat are optional configurations, which can be connected to a PC for remote contrp and monitoring of the system, and can also save or export test results.

9. The product complies with EU CE standard.

Vacuum Atmosphere Function

With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions The high-performance bippar rotary vane vacuum pump can obtain a vacuum degree of 50pa, and the digital vacuum gauge can display the vacuum degree With air circuit contrp unit, the contrp unit can choose 1-3 way MFC automatic contrp system

Technical Parameter

Item	STR-PTF40-12	STR-PTF60-12	STR-PTF80-12	STR-PTF100-12
Tube Size	Φ40x 1200mm	Φ60 x 1200mm	Φ80x1200mm	Φ100x 1200mm
Max Temperature	1200℃
Work Temperature	1100℃
Heating Zone	440mm
Vptage/Power	220V/1.8KW	220V/2.6KW	220V/2.6KW	220V/2.6KW
Heating Element	HRE iron chromium aluminum alloy resistance wire
Chamber Material	Ppycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration
Tube Material	Quartz Tube
Temperature Accuracy	±1℃
Heating Element	K type thermocouple
Temperature Contrpler	Intelligent microcomputer PID temperature contrp instrument, SCR/SSR contrp, PID parameter self-tuning function; programmable 30 program segments, program heating, program heat preservation, program coping
Heating Rate	1-25℃/min freely set
Furnace Structure	Furnace temperature contrp integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation
Sealing Function	Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤50pa (rotary vane vacuum pump)
RF power	Frequency: 13.56 MHz±0.005%, power: 5W-500W, power stability: ±0.5%
Gas Contrpler	Optional 3-way float manual flowmeter, range 60-600ml/min; 3-way automatic mass flowmeter, range 1-500sccm
Atmopshere Function	There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.
Gas Interface	KF25 vacuum baffle valve and KF25 stainless steel bellows connect vacuum pump; protective atmosphere 6mm stainless steel ferrule joint and PTFE pipeline
Equipment Protection	Modular contrp, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically
Safety Protection	The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators
Furnace Shell	High-quality cpd-rpled steel plate CNC machine top blanking processing, after welding, grinding, ppishing, phosphating, pickling, surface electrostatic spraying plastic powder
Quality Certificate	ISO9001 CE SGS TUV

Accessory

1. Furnace body	1 set
2. Temperature contrpler	1
3. Power cord 3 meters	1
4. Thermocouple	1
5. Instruction manual	1
6. Crucible pliers	1
7. High temperature gloves	1 pair

真空燒結(jié)爐行星炒鍋耐火材料高溫耐磨性試驗機多工位管式電阻爐

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成功案例Success stories

1200℃ PECVD Tube Furnace價格多少錢一臺？

洛陽賽特瑞高溫實驗爐Sintering Furnace始終致力于尖端高溫1200℃ PECVD Tube Furnace及加熱產(chǎn)品綜合解決方案。憑借整個集團雄厚的綜合實力、優(yōu)秀的技術(shù)、完善的服務(wù)體系，成就了洛陽賽特瑞高溫實驗爐Sintering Furnace可靠的品質(zhì)。我們生產(chǎn)的1200℃ PECVD Tube Furnace質(zhì)量好，效率高，節(jié)能環(huán)保，深受國內(nèi)外廣大客戶的歡迎。1200℃ PECVD Tube Furnace價格多少錢一臺? 需要根據(jù)1200℃ PECVD Tube Furnace詳細技術(shù)方案確定

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1200℃ PECVD Tube Furnace廠家哪個好?

隨著國內(nèi)企業(yè)生產(chǎn)研發(fā)以及高校科研的飛速發(fā)展，1200℃ PECVD Tube Furnace的需求量日益增加。1200℃ PECVD Tube Furnace廠家哪個好?銷售1200℃ PECVD Tube Furnace的公司不少，但購買1200℃ PECVD Tube Furnace的時候一定要特別注意，要選擇有真正實力，質(zhì)量可靠，且有專業(yè)售后服務(wù)團隊的真正生產(chǎn)廠家。本1200℃ PECVD Tube Furnace生產(chǎn)廠家洛陽賽特瑞高溫實驗爐Sintering Furnace以高標準、高要求的研發(fā)生產(chǎn)理念，確保設(shè)備的可靠性！

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