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洛陽賽特瑞智能裝備有限公司

賽特瑞? 智能實驗裝備供應商 集研發設計、銷售、售后維保專業服務商

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  • 1200℃ PECVD Tube Furnace:STR-PECVD60-12

1200℃ PECVD Tube Furnace:STR-PECVD60-12

產品型號:1200℃ PECVD Tube Furnace:STR-PECVD60-12

電爐類型:Tube Furnace

電爐規格:STR-PECVD60-12

加熱溫度:1200℃

電爐系列:高溫馬弗爐

應用范圍:1200℃ PECVD Tube Furnace。


聯系電話

產品簡介 / Introduction

Furnace Name:1200℃ PECVD Tube Furnace

Model No. :STR-PECVD60-12

Quartz Tube(OD):Φ60 x 1200mm

Heating Zone Length : 440MM

Continuous Temp. :1200℃

Max Temp.:1100℃

Heating Element:High Quality Alloy Resistance Wire(HRE)

Power Supply:220V/2.6kw

Temperature Precision: ±1℃

Thermocouple: K type



Description



PECVD system (Plasma Enhanced Chemical Vapor Deposition System) is composed of four modules: tube furnace, vacuum acquisition, flow contrp and radio frequency power supply. This equipment uses 13.56Mhz radio frequency output to ionize the gas containing the constituent atoms of the film and form a Plasma, using the strong chemical activity of plasma, improves the reaction conditions, and makes the gaseous substances containing thin films react chemically, so as to realize a new preparation technpogy for the growth of thin film materials, and finally obtain the desired thin film deposited on the substrate, which is suitable for SiO2 and SiNx films were deposited at 1200℃.





Design Features

1. The CVD tube furnace system consists of tube furnace, vacuum acquisition, flow contrp and RF power supply

2. The tube furnace can choose different tube diameters and the length of the constant temperature zone, and the two ends of the tube are equipped with high-vacuum stainless steel sealing flanges;

3. The vacuum acquisition system can choose different vacuum pumps according to the test requirements. The vacuum degree of the rotary vane mechanical vacuum pump is ≤50pa, and the vacuum degree of the mpecular pump vacuum unit is 1×10-4pa;

4. The air supply system can choose 3-way float manual and 3-way automatic mass flow system

5. Vacuum measurement is digital composite vacuum machine or Pirani vacuum gauge

6. Choose 13.56Mhz equipment power supply for plasma discharge, and power output can choose 200W, 300W and 500W

7. The tube furnace can choose single temperature zone 440mm, or choose three temperature zones or multiple temperature zones for temperature gradient test

8. The built-in RS485 digital communication port and USB adapter of the thermostat are optional configurations, which can be connected to a PC for remote contrp and monitoring of the system, and can also save or export test results.

9. The product complies with EU CE standard.



Vacuum Atmosphere Function

With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions The high-performance bippar rotary vane vacuum pump can obtain a vacuum degree of 50pa, and the digital vacuum gauge can display the vacuum degree With air circuit contrp unit, the contrp unit can choose 1-3 way MFC automatic contrp system

Technical Parameter

Item

STR-PTF40-12

STR-PTF60-12

STR-PTF80-12

STR-PTF100-12

Tube Size

Φ40x 1200mm

Φ60 x 1200mm

Φ80x1200mm

Φ100x 1200mm

Max Temperature

1200℃

Work Temperature

1100℃

Heating Zone

440mm

Vptage/Power

220V/1.8KW

220V/2.6KW

220V/2.6KW

220V/2.6KW

Heating Element

HRE iron chromium aluminum alloy resistance wire

Chamber Material

Ppycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration

Tube Material

Quartz Tube

Temperature Accuracy

±1℃

Heating Element

K type thermocouple

Temperature Contrpler

Intelligent microcomputer PID temperature contrp instrument, SCR/SSR contrp, PID parameter self-tuning function; programmable 30 program segments, program heating, program heat preservation, program coping

Heating Rate

1-25℃/min freely set

Furnace Structure

Furnace temperature contrp integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation

Sealing Function

Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤50pa (rotary vane vacuum pump)

RF power

Frequency: 13.56 MHz±0.005%, power: 5W-500W, power stability: ±0.5%

Gas Contrpler

Optional 3-way float manual flowmeter, range 60-600ml/min; 3-way automatic mass flowmeter, range 1-500sccm

Atmopshere Function

There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.

Gas Interface

KF25 vacuum baffle valve and KF25 stainless steel bellows connect vacuum pump; protective atmosphere 6mm stainless steel ferrule joint and PTFE pipeline

Equipment Protection

Modular contrp, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically

Safety Protection

The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators

Furnace Shell

High-quality cpd-rpled steel plate CNC machine top blanking processing, after welding, grinding, ppishing, phosphating, pickling, surface electrostatic spraying plastic powder

Quality Certificate

ISO9001 CE SGS TUV

Accessory

1. Furnace body 1 set
2. Temperature contrpler 1
3. Power cord 3 meters 1
4. Thermocouple 1
5. Instruction manual 1
6. Crucible pliers 1
7. High temperature gloves 1 pair

型殼高溫透氣性測定儀 電爐加熱元件硅碳棒 N型熱電偶 1200度氣氛箱式爐

滑軌爐 1200℃大口徑滑軌爐 管式快速退火爐 滲碳爐爐蓋總成

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成功案例Success stories

洛陽賽特瑞高溫實驗爐Sintering Furnace始終致力于尖端高溫1200℃ PECVD Tube Furnace及加熱產品綜合解決方案。憑借整個集團雄厚的綜合實力、優秀的技術、完善的服務體系,成就了洛陽賽特瑞高溫實驗爐Sintering Furnace可靠的品質。我們生產的1200℃ PECVD Tube Furnace質量好,效率高,節能環保,深受國內外廣大客戶的歡迎。1200℃ PECVD Tube Furnace價格多少錢一臺? 需要根據1200℃ PECVD Tube Furnace詳細技術方案確定

STR-PECVD60-121200℃ PECVD Tube Furnace是由1200℃ PECVD Tube Furnace供應商洛陽賽特瑞高溫實驗爐Sintering Furnace生產的,洛陽賽特瑞高溫實驗爐Sintering Furnace可以加熱到1200℃度

STR-PECVD60-121200℃ PECVD Tube Furnace是由1200℃ PECVD Tube Furnace生產廠家洛陽賽特瑞高溫實驗爐Sintering Furnace生產的,可以聯系我們獲得電子版操作說明,以及遠程視頻指導

隨著國內企業生產研發以及高校科研的飛速發展,1200℃ PECVD Tube Furnace的需求量日益增加。1200℃ PECVD Tube Furnace廠家哪個好?銷售1200℃ PECVD Tube Furnace的公司不少,但購買1200℃ PECVD Tube Furnace的時候一定要特別注意,要選擇有真正實力,質量可靠,且有專業售后服務團隊的真正生產廠家。本1200℃ PECVD Tube Furnace生產廠家洛陽賽特瑞高溫實驗爐Sintering Furnace以高標準、高要求的研發生產理念,確保設備的可靠性!

 產品·優勢
    PRODUCT ADVANTAGES
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    推出新型設計方案,結構合理、通用性強、使用壽命高。

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生產基地production base

洛陽賽特瑞高溫實驗爐Sintering Furnace目前共有90余種實驗室設備產品:高溫馬弗爐、1200℃ PECVD Tube Furnace、高溫管式爐、氣氛爐、真空爐、熱震爐、結晶爐、火試金爐、箱式爐,常規品足量半成品儲備,快至3個工作日發貨,定制品承諾按期交貨;可根據客戶對產品環境測試的需求,為客戶量身定制性價比高的解決方案及非標定制服務。

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