plasma enhanced chemical vapor deposition (PECVD) tube furnace system

產(chǎn)品型號：plasma enhanced chemical vapor deposition (PECVD) tube furnace system

電爐類型：真空爐

電爐規(guī)格：

加熱溫度：

電爐系列：高溫馬弗爐

應(yīng)用范圍：。

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產(chǎn)品簡介 / Introduction

Split Tube furnace	1	1200oC Max. working temperature for < 60 minutes
	2	1100oC Max for continuous heating
	3	30 segments programmable precision digital temperature controller
	4	440 mm length single heating zone and 150 mm length constant temperate zone
	5	High purity quartz tube optional from ( click optional bar to choose )
	6	3.14"OD x 2.83"ID x 48'' Length
	7	One pair of vacuum sealed flange with valves
	8	Input power: 208 – 240V AC input, single phase at max. 4KW
	9
Plasma RF Power supply	1	Output Power: 5 -500W adjustable with ± 1% stability
	2	RF frequency: 13.56 MHz ±0.005% stability
	3	Reflection Power: 200W max.
	4	Matching: Automatic
	5	RF Output Port: 50 Ω, N-type, female
	6	Noise: <50 dB.
	7	Cooling: Air cooling.
	8	Power : 208-240VAC, 50/60Hz
	9	Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
	10
Anti-corrosive Pressure Gauge	1	3.8x10-5 to 1125 Torr measurement range
	2	Anti-corrosive, gas-type independent
	3	High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
	4	Fast atmospheric detection eliminates waiting time and shortens process cycle
	5	Easy to exchange plug & play sensor element
	6
Vacuum Pump and valve	1	Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr.
	2	KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
	3	Digital vacuum pressure gauge and display are installed with the furnace
	4
	4
Mass Flow meters	1	Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
	2	MFC 1: Gas flow range from 0~100 sccm
	3	MFC 2&3: Control range from 0~200 sccm
	4	MFC 4: Control range from 0~500 sccm
	5	One gas mixing tank is installed on bottom case with liquid release valve
	6	4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
	7	Gas inlet fitting: four 1/4NPS
	8	Gas outlet fitting: four 1/4NPS
	9

大管徑管式爐高溫石墨化碳管爐導(dǎo)熱系數(shù)測試儀真空管式爐

1200℃大口徑滑軌爐管式快速退火爐滲碳爐爐蓋總成鐘罩式金剛石鋸片氫氣保護燒結(jié)爐

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成功案例Success stories

價格多少錢一臺？

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可以加熱到多少度？

是由供應(yīng)商洛陽賽特瑞高溫實驗爐Sintering Furnace生產(chǎn)的,洛陽賽特瑞高溫實驗爐Sintering Furnace可以加熱到度

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廠家哪個好?

隨著國內(nèi)企業(yè)生產(chǎn)研發(fā)以及高校科研的飛速發(fā)展，的需求量日益增加。廠家哪個好?銷售的公司不少，但購買的時候一定要特別注意，要選擇有真正實力，質(zhì)量可靠，且有專業(yè)售后服務(wù)團隊的真正生產(chǎn)廠家。本生產(chǎn)廠家洛陽賽特瑞高溫實驗爐Sintering Furnace以高標(biāo)準(zhǔn)、高要求的研發(fā)生產(chǎn)理念，確保設(shè)備的可靠性！

產(chǎn)品·優(yōu)勢

PRODUCT ADVANTAGES

外形美觀

外殼由冷軋鋼板折,表面經(jīng)高速拋丸后靜電噴塑。
密封圈式電纜

可拆卸組合面有密封墊、環(huán)、圈、帽。
產(chǎn)品更耐用

推出新型設(shè)計方案，結(jié)構(gòu)合理、通用性強、使用壽命高。
按需定制

可按客戶要求定制。

生產(chǎn)基地production base

洛陽賽特瑞高溫實驗爐Sintering Furnace目前共有90余種實驗室設(shè)備產(chǎn)品：高溫馬弗爐、、高溫管式爐、氣氛爐、真空爐、熱震爐、結(jié)晶爐、火試金爐、箱式爐，常規(guī)品足量半成品儲備，快至3個工作日發(fā)貨，定制品承諾按期交貨；可根據(jù)客戶對產(chǎn)品環(huán)境測試的需求，為客戶量身定制性價比高的解決方案及非標(biāo)定制服務(wù)。