plasma enhanced chemical vapor deposition (PECVD) tube furnace system

產品型號：plasma enhanced chemical vapor deposition (PECVD) tube furnace system

電爐類型：真空爐

電爐規格：

加熱溫度：

電爐系列：高溫馬弗爐

應用范圍：。

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產品簡介 / Introduction

Split Tube furnace	1	1200oC Max. working temperature for < 60 minutes
	2	1100oC Max for continuous heating
	3	30 segments programmable precision digital temperature controller
	4	440 mm length single heating zone and 150 mm length constant temperate zone
	5	High purity quartz tube optional from ( click optional bar to choose )
	6	3.14"OD x 2.83"ID x 48'' Length
	7	One pair of vacuum sealed flange with valves
	8	Input power: 208 – 240V AC input, single phase at max. 4KW
	9
Plasma RF Power supply	1	Output Power: 5 -500W adjustable with ± 1% stability
	2	RF frequency: 13.56 MHz ±0.005% stability
	3	Reflection Power: 200W max.
	4	Matching: Automatic
	5	RF Output Port: 50 Ω, N-type, female
	6	Noise: <50 dB.
	7	Cooling: Air cooling.
	8	Power : 208-240VAC, 50/60Hz
	9	Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
	10
Anti-corrosive Pressure Gauge	1	3.8x10-5 to 1125 Torr measurement range
	2	Anti-corrosive, gas-type independent
	3	High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
	4	Fast atmospheric detection eliminates waiting time and shortens process cycle
	5	Easy to exchange plug & play sensor element
	6
Vacuum Pump and valve	1	Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in bottom case with max. vacuum pressure 10-2 torr.
	2	KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
	3	Digital vacuum pressure gauge and display are installed with the furnace
	4
	4
Mass Flow meters	1	Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
	2	MFC 1: Gas flow range from 0~100 sccm
	3	MFC 2&3: Control range from 0~200 sccm
	4	MFC 4: Control range from 0~500 sccm
	5	One gas mixing tank is installed on bottom case with liquid release valve
	6	4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
	7	Gas inlet fitting: four 1/4NPS
	8	Gas outlet fitting: four 1/4NPS
	9

油管伴熱加熱器雙面磨核桃蛋白飲料 1700℃雙溫區管式爐

滑軌爐 1200℃大口徑滑軌爐管式快速退火爐滲碳爐爐蓋總成

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成功案例Success stories

價格多少錢一臺？

洛陽賽特瑞高溫實驗爐Sintering Furnace始終致力于尖端高溫及加熱產品綜合解決方案。憑借整個集團雄厚的綜合實力、優秀的技術、完善的服務體系，成就了洛陽賽特瑞高溫實驗爐Sintering Furnace可靠的品質。我們生產的質量好，效率高，節能環保，深受國內外廣大客戶的歡迎。價格多少錢一臺? 需要根據詳細技術方案確定

可以加熱到多少度？

是由供應商洛陽賽特瑞高溫實驗爐Sintering Furnace生產的,洛陽賽特瑞高溫實驗爐Sintering Furnace可以加熱到度

溫控表怎么操作?

是由生產廠家洛陽賽特瑞高溫實驗爐Sintering Furnace生產的,可以聯系我們獲得電子版操作說明，以及遠程視頻指導

廠家哪個好?

隨著國內企業生產研發以及高校科研的飛速發展，的需求量日益增加。廠家哪個好?銷售的公司不少，但購買的時候一定要特別注意，要選擇有真正實力，質量可靠，且有專業售后服務團隊的真正生產廠家。本生產廠家洛陽賽特瑞高溫實驗爐Sintering Furnace以高標準、高要求的研發生產理念，確保設備的可靠性！

產品·優勢

PRODUCT ADVANTAGES

外形美觀

外殼由冷軋鋼板折,表面經高速拋丸后靜電噴塑。
密封圈式電纜

可拆卸組合面有密封墊、環、圈、帽。
產品更耐用

推出新型設計方案，結構合理、通用性強、使用壽命高。
按需定制

可按客戶要求定制。

生產基地production base

洛陽賽特瑞高溫實驗爐Sintering Furnace目前共有90余種實驗室設備產品：高溫馬弗爐、、高溫管式爐、氣氛爐、真空爐、熱震爐、結晶爐、火試金爐、箱式爐，常規品足量半成品儲備，快至3個工作日發貨，定制品承諾按期交貨；可根據客戶對產品環境測試的需求，為客戶量身定制性價比高的解決方案及非標定制服務。