Brief Introduction of pecvd System:

PECVD is a compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 600W RF plasma source, 120mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.

Technical Parameter:

Model		STR-O1200-4CPECVD
Tube Furnace	Display	LED
	Max. Temperature	1200℃
	Continuous Woking Temp.	≤1100℃
	Heating Rate	0~20℃/min
	Temperature Zone length	440mm
	Accuracy	±1℃
	Tube Size	Ф120mm x 1400mm
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Power	220V, 50 or 60Hz, single phase at max. 2.5KW
Plasma RF Power supply	Output Power	5 -600W adjustable with ± 1% stability
	RF frequency	13.56 MHz ±0.005% stability
	Reflection Power	200W max.
	Matching	Automatic
	RF Output Port	50 Ω, N-type, female
	Noise	<50 dB.
	Cooling	Air cooling.
	Power	220V, 50 or 60 Hz
Ditial Vacuum Gauge	1x10-6 to 1125 Torr measurement range Anti-corrosive, gas-type independent

We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!