pecvd System
- 別稱：
- 類型：高溫電爐系列
- 溫度：
- 規(guī)格：
產(chǎn)品詳情
Brief Introduction of pecvd System:
PECVD is a compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 600W RF plasma source, 120mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.
Technical Parameter:
Brief Introduction of pecvd System:
PECVD is a compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 600W RF plasma source, 120mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. Technical Parameter:
| Model | STR-O1200-4CPECVD | |
| Tube Furnace | Display | LED |
| Max. Temperature | 1200℃ | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | 0~20℃/min | |
| Temperature Zone length | 440mm | |
| Accuracy | ±1℃ | |
| Tube Size | Ф120mm x 1400mm | |
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Power | 220V, 50 or 60Hz, single phase at max. 2.5KW | |
|
Plasma RF Power supply |
Output Power | 5 -600W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Power | 220V, 50 or 60 Hz | |
| Ditial Vacuum Gauge |
1x10-6 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
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We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!
生產(chǎn)廠家哪家好？pecvd System-洛陽賽特瑞高溫實(shí)驗(yàn)爐Sintering Furnace為專業(yè)的生產(chǎn)廠家，具有多年的研發(fā)與生產(chǎn)經(jīng)驗(yàn)、質(zhì)量穩(wěn)定可靠 TAG:
洛陽賽特瑞高溫實(shí)驗(yàn)爐Sintering Furnace是高溫爐_高溫馬弗爐_實(shí)驗(yàn)電爐_高溫電爐_真空氣氛爐_熱震實(shí)驗(yàn)爐_箱式電爐_負(fù)極材料預(yù)碳化箱式氣氛爐_石墨化爐_高溫電阻爐_升降電爐_工業(yè)電爐等設(shè)備和高溫電爐配件生產(chǎn)廠家
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