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pecvd System-洛陽賽特瑞高溫實驗爐Sintering Furnace

pecvd System

  • 別稱:
  • 類型:高溫電爐系列
  • 溫度:
  • 規(guī)格:

產(chǎn)品詳情


Brief Introduction of pecvd System:

PECVD is a compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 600W RF plasma source, 120mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.

Technical Parameter:

Model STR-O1200-4CPECVD
Tube Furnace Display LED
Max. Temperature 1200℃
Continuous Woking Temp. ≤1100℃
Heating Rate 0~20℃/min
Temperature Zone length 440mm
Accuracy ±1℃
Tube Size Ф120mm x 1400mm
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Power 220V, 50 or 60Hz, single phase at max. 2.5KW
Plasma RF Power
supply
Output Power 5 -600W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Noise <50 dB.
Cooling Air cooling.
Power 220V, 50 or 60 Hz
Ditial Vacuum Gauge 1x10-6 to 1125 Torr measurement range
Anti-corrosive, gas-type independent

We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!








生產(chǎn)廠家哪家好?pecvd System-洛陽賽特瑞高溫實驗爐Sintering Furnace為專業(yè)的生產(chǎn)廠家,具有多年的研發(fā)與生產(chǎn)經(jīng)驗、質(zhì)量穩(wěn)定可靠 TAG:

洛陽賽特瑞高溫實驗爐Sintering Furnace是高溫爐_高溫馬弗爐_實驗電爐_高溫電爐_真空氣氛爐_熱震實驗爐_箱式電爐_負極材料預碳化箱式氣氛爐_石墨化爐_高溫電阻爐_升降電爐_工業(yè)電爐等設備和高溫電爐配件生產(chǎn)廠家

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